MICRO PLANETARY REDUCTION GEAR USING SURFACE-MICROMACHINING
Abstract
A micro planetary gear mechanism featuring a high gear reduction ratio with compactness in size ispresented in this paper. SUMMiT V is employed for the fabrication method so that the redundancy of assembling parts is eliminated. The design rules of which has also been checked. To make full use of the benefits of the surface- micro - machining, the planetary reduction gear is designed toward using the on-chip micro- engine. The expected gearreduction ratio is calculated and compared with the conventional chain gear mechanism. The microplanetary gear mechanism presented in this paper is expected to have 162:1 reduction ratio utilizing less space consumption. This is an order of magnitude higher than the previously reported design in a single reduction gear train.
Keywords:MEMS, planetary gear, reduction gear surface-micromachining, SUMMiT V process
